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ISSN Online: 2377-424X

International Heat Transfer Conference 12
August, 18-23, 2002, Grenoble, France

Graphitic carbon coatings on fused quartz by laser-induced chemical vapor deposition

Get access (open in a dialog) DOI: 10.1615/IHTC12.3600
6 pages

摘要

Initial results on Laser-Induced Chemical Vapor Deposition (LCVD) of carbon films on fused quartz substrates using a CO2 laser are presented. In this work, LCVD of carbon films are deposited from methane (CH4), propane (C3H8) and butane (C4H10). The deposition rate of the three hydrocarbon gases are determined by measuring the mass of the carbon film deposited at constant temperature, and validated by measuring the thickness of carbon film via ESEM. The results indicate that butane and propane has significant deposition at 1375K to 1500K, while deposition starts at 1550K for methane. Among the three hydrocarbon gases, butane has the highest activation energy of435 KJ/mol compared to 410 KJ/mol for propane at 1375K to 1500K. The activation energy of methane is 330 KJ/mol at temperature range of 1550K to 1750K. Raman spectra ofcarbon films deposited from propane indicated that the surface consists of glassy or nanocrystalline graphite.