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ISSN Online: 2377-424X

ISBN Print: 1-56032-797-9

International Heat Transfer Conference 11
August, 23-28, 1998, Kyongju, Korea

EXPERIMENTAL STUDY OF ABLATION OF POLYMER MATERIAL USING EXCIMER LASER (INFLUENCE OF IRRADIATION ANGLE)

Get access (open in a dialog) DOI: 10.1615/IHTC11.190
pages 111-116

Abstract

Polymer ablation by a UV laser irradiation was investigated. Polyethylene terephthalate sheets were irradiated at 10Hz with the 193nm ArF excimer laser pulses, where the polymer material has an extremely high absorption coefficient at 193nm. For various conditions of irradiation, the ablation mass and depth were measured. The morphological microstructure of the sample surface after irradiation was also observed with an optical microscope and a scanning electron microscope. Influence of the number of irradiated pulses, fluence, and incident angle on the macroscopic and microscopic characteristics were made clear. Particularly, that of the incident angle was found to be remarkable.