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International Heat Transfer Conference 11

ISSN: 2377-424X (online)
ISSN: 2377-4371 (flashdrive)

DYNAMIC MODELLING OF CZOCHRALSKI CRYSTAL GROWTH PROCESS

Fumimaru Ogino
Department of Chemical Engineering, Kyoto University, Kyoto, Japan

T. Inarnuro
Department of Chemical Engineering Kyoto University, Kyoto 606-8501, Japan

A. Kodo
Department of Chemical Engineering Kyoto University, Kyoto 606-8501, Japan

Abstract

By using simplified equations presented by Ogino(1996) the effect of the fluctuation of the crucible wall temperature on the radius of the crystal in the Czochralski crystal growth process is investigated. First, in the case of the constant radius of the crystal and the constant temperature of the melt, the time variations of the pulling velocity of the crystal and the temperature of the crucible wall are obtained. Next, when the radius of the crystal is kept constant, and the temperature of .the crucible wall is changed sinusoidally, the fluctuation of the pulling velocity is calculated. Finally, the effect of the fluctuation of the crucible wall temperature on the crystal radius is obtained for various amplitudes and periods of the fluctuations. It is found that the response of the crystal radius to the fluctuation of the temperature of the crucible wall is approximated by the second-order lag system.

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