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International Heat Transfer Conference 16

ISSN: 2377-424X (online)
ISSN: 2377-4371 (flashdrive)

DEVELOPMENT OF METAL SUBSTRATE MEMS SENSORS FOR LOCAL MULTIPOINT HEAT FLUX MEASUREMENT IN ENGINES

Kazuhito Dejima
Meiji University, 1-1-1, Higashimita, Tama-ku, Kawasaki 214-8571, Japan

Osamu Nakabeppu
Meiji University, 1-1-1, Higashimita, Tama-ku, Kawasaki 214-8571, Japan

Yuto Nakamura
Meiji University, 1-1-1, Higashimita, Tama-ku, Kawasaki 214-8571, Japan

Tomohiro Tsuchiya
Meiji University, 1-1-1, Higashimita, Tama-ku, Kawasaki 214-8571, Japan

Keisuke Nagasaka
Onosokki, 3-9-3, Shin-Yokohama, Kohoku-ku, Yokohama 222-8507, Japan

DOI: 10.1615/IHTC16.tpm.023004
pages 8721-8726


KEY WORDS: Measurement and instrumentation, IC engines, MEMS, Heat flux measurement

Abstract

Three thin film resistance sensors were fabricated on a metal substrate with MEMS technologies for heat flux measurement on an engine inner wall. To investigate turbulent heat transfer in the engine, the heat flux sensor is required to have multi measurement points on sub-millimeter scale. In addition, the measurement noise has to be low enough to evaluate the instantaneous heat flux, and the sensor must have high durability due to the harsh environment in the engine. Through measurement tests of the three-point sensor and prototypes, it was revealed the MEMS heat flux sensor satisfied the required performances. From this result, it can be expected that the MEMS heat flux sensor becomes a powerful tool for engine heat transfer investigation. The turbulent heat transfer in the engine is characterized from instantaneous three-point heat flux data measured with the MEMS sensor.

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