Abo Bibliothek: Guest

ISSN Online: 2377-424X

ISBN Print: 978-1-56700-421-2

International Heat Transfer Conference 15
August, 10-15, 2014, Kyoto, Japan

Practical Measurement System for Very-Large-Scale Integration Circuits Using Infrared Thermography

Get access (open in a dialog) DOI: 10.1615/IHTC15.eec.009936
pages 2019-2026

Abstrakt

Infrared thermography is an important tool for noncontact temperature measurement. Modern advanced temperature measurement systems, such as InfraScope from QFI and SC5600 from FLIR, are based on this approach to achieve both high image resolution and temperature accuracy. Since the image resolution is very high, the measurement systems are usually considered as the debugging tool for very-large-scale integration circuits since integrated circuits (ICs) can operate with abnormal functions or be damaged due to excessive heat inner the ICs. Observing the on-chip heat distribution during the prototype IC procedure is also significant for cost reduction. However, it is very difficult to apply the aforementioned measurement systems to a prototype IC. Since commercial ICs are normally made of materials with significantly varying radiation properties, emissivity mapping tables are required as the reference for producing correct infrared thermographs. The traditional approach is based on heating the test object to a desired temperature by a hot plate and making sure that the emissivity mapping table is built under a correct temperature. However, many prototype ICs are usually verified in unpackaged type, it is impossible to mount them on the hot plate. This paper presents a temperature measurement system based on FLIR 5650. The system is built in a climate chamber to ensure that it can handle most practical measurement conditions. A Microsoft windows-based program is also built in this system to overcome the offset of emissivity mapping table that caused by thermal expansion of the micro stage. The image resolution of this measurement system is higher than 3 μm per pixel and the total image size is 640 x 512 pixels. After offset correction, the effective image size is still up to 610 x 500 pixels.