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ISSN Online: 2377-424X

ISBN Print: 978-1-56700-474-8

ISBN Online: 978-1-56700-473-1

International Heat Transfer Conference 16
August, 10-15, 2018, Beijing, China

DEVELOPMENT OF METAL SUBSTRATE MEMS SENSORS FOR LOCAL MULTIPOINT HEAT FLUX MEASUREMENT IN ENGINES

Get access (open in a dialog) DOI: 10.1615/IHTC16.tpm.023004
pages 8721-8726

要約

Three thin film resistance sensors were fabricated on a metal substrate with MEMS technologies for heat flux measurement on an engine inner wall. To investigate turbulent heat transfer in the engine, the heat flux sensor is required to have multi measurement points on sub-millimeter scale. In addition, the measurement noise has to be low enough to evaluate the instantaneous heat flux, and the sensor must have high durability due to the harsh environment in the engine. Through measurement tests of the three-point sensor and prototypes, it was revealed the MEMS heat flux sensor satisfied the required performances. From this result, it can be expected that the MEMS heat flux sensor becomes a powerful tool for engine heat transfer investigation. The turbulent heat transfer in the engine is characterized from instantaneous three-point heat flux data measured with the MEMS sensor.