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ISSN Online: 2377-424X

ISBN Print: 978-1-56700-474-8

ISBN Online: 978-1-56700-473-1

International Heat Transfer Conference 16
August, 10-15, 2018, Beijing, China

PROVING SURFACE PHONON POLARITONS CONTRIBUTION TO THERMAL CONDUCTIVITY IN SIN SUBMICRON FILMS

Get access (open in a dialog) DOI: 10.1615/IHTC16.hte.024037
pages 5373-5379

摘要

Theoretical calculations of the heat flux carried by phonons-polaritons along a SiN thin film are provided and show the possible predominance of the latter on the heat flux via phonons. We then experimentally measure the effective in-plane thermal conductivity of amorphous SiN thin films and show that it can indeed be increased by surface phonon-polaritons (SPhPs) significantly when the film thickness scales down. The thermal conductivity of the 100nm thick film is found to be 2.5W/(mK) higher than the one of the 200nm thick film at 500K