ISSN Online: 2377-424X
ISBN CD: 1-56700-226-9
ISBN Online: 1-56700-225-0
International Heat Transfer Conference 13
DEVELOPMENT OF NANOSCALE THERMAL CONDUCTIVITY IMAGING METHOD USING THERMOELECTRIC SCANNING THERMAL MICROSCOPE PROBE
Abstrakt
In this paper we present the 2ω method, a novel AC mode local thermal property imaging technique with nanoscale spatial resolution. In order to use thermoelectric probe as an active probe that can function both as a heater and a temperature sensor, we developed and demonstrated the 2ω signal measurement technique that can extract thermoelectric signal from a thermocouple junction while electrically heating it simultaneously. We batch-fabricated thermoelectric, whose junction size is about 200 nm with yield higher than 95 %. We experimentally demonstrated that the 2ω method can map out the local thermal property of a sample by monitoring the amplitude of the 2ω signal from the thermocouple junction of a probe being heated with AC current simultaneously. Through the comparison with the thermal property images obtained by other methods, we also showed that the 2ω method using the point-heating and point-sensing scheme is the most suitable for the nanoscale thermal property imaging.