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ISSN Online: 2377-424X

ISBN Print: 1-56032-797-9

International Heat Transfer Conference 11
August, 23-28, 1998, Kyongju, Korea

CONVECTIVE HEAT TRANSFER AND FLOW STABILITY IN ROTATING DISK CVD REACTORS

Get access (open in a dialog) DOI: 10.1615/IHTC11.280
pages 163-168

Resumo

The flow and heat transfer of NH3 and He have been studied in a rotating disk reactor with applications to chemical vapor deposition systems. The effects of the important operating parameters were studied numerically over ranges of the primary dimensionless variables: the spin Reynolds number, Reω ,the disk mixed convection parameter, MCPd and a new parameter, the wall mixed convection parameter, MCPW. Inlet velocities were set to the. corresponding infinite rotating disk asymptotic velocity. Results (obtained primarily for NH3) show that increasing Reω from 314.5 to 3145 increases the uniformity of the rotating disk heat flux and yields thinner thermal boundary layers at the disk surface. At Reω= 314.5, increasing MCPd to 15 leads to significant departure from the infinite disk result with nonuniform disk heat fluxes and recirculating flow patterns. At Reω= 3145, the results are closer to the infinite disk for MCPd up to 15. For large values of Reω, the flow recirculates and there is significant deviation from the infinite disk result. The influence of MCPW on flow stability is increased at larger MCPd and lower Reω. The results show that because of variable transport properties, the flow of NH3 is less stable than that of He as MCPd is increased for MCPW = 0 and Reω= 314.5.