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ISSN Online: 2377-424X

ISBN Print: 1-56032-797-9

International Heat Transfer Conference 11
August, 23-28, 1998, Kyongju, Korea

RECOVERY MECHANISMS FOR STICTION-FAILED MICROCANTILEVERS USING SHORT-PULSE LASERS

Get access (open in a dialog) DOI: 10.1615/IHTC11.250
pages 145-150

Аннотация

Recently, stiction-failed microcantilevers have been freed from the substrate using 150 femtosecond, fs, 800 nm laser pulses. This paper presents analyses of ultrashort-pulse laser interactions with polycrystalline silicon microcantilevers in order to identify the physical mechanism for this process. Electronically mediated disruption of the adhesion between the microcantilever and the substrate exhibits a pulse duration dependence similar to that observed experimentally. Other possible contributing mechanisms include radiation pressure induced vibrations, thermal expansion, and acoustic waves.